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Characterization of a Free-Standing Membrane Supported Superconducting Ti Transition Edge Sensor
Zhang, Wen1,2; Miao, Wei1,2; Wang, Zheng1,2; Liu, Dong1,2; Zhong, Jia-Qiang1,2; Guo, Xiao-Hui1,2; Wu, F.1,2; Yao, QiJun1,2; Shi, Sheng-Cai1,2
2017-06-01
Source PublicationIEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY
ISSN1051-8223
Volume27Issue:4Pages:6
Corresponding AuthorZhang, Wen(wzhang@pmo.ac.cn)
AbstractSuperconducting transition edge sensors (TES) based on a Ti microbridge on Si substrate have demonstrated a very low noise equivalent power. Their effective response time, however, is in the order of microseconds due to relatively high transition temperature (i.e., 300-400 mK) of the Ti microbridge, making it difficult to read out the signal of a large Ti TES array with a SQUID-based multiplexer. We propose a twin-slot antenna coupled superconducting Ti microbridge separated from the antenna feed and supported by a free-standing membrane. Its resistive transition (R-T) and current-voltage (I-V) curves are measured before and after KOH wet etching of the Si substrate underneath the Ti microbridge. The free-standing membrane supported Ti TES with a thickness of 40 nm shows slightly lower transition temperature and higher normal resistance. Its thermal conductance is reduced to similar to 800 pW/ K from similar to 3000 pW/ K. In addition, its effective response time measured with a current pulse signal is about 5 mu s. The uniformity of the 8 x 8 TES array is studied by measuring the distribution of normal resistance and critical temperature. In order to improve the uniformity, we increase the Ti film thickness to 64 nm, and characterize its thermal and electrical features.
KeywordSuperconducting transition edge sensor thermal conductance response time noise equivalent power KOH wet etch
DOI10.1109/TASC.2017.2655729
WOS KeywordANTENNA ; BOLOMETER ; MICROCALORIMETER ; RESOLUTION ; TELESCOPE ; THZ
Indexed BySCI
Language英语
WOS Research AreaEngineering ; Physics
WOS SubjectEngineering, Electrical & Electronic ; Physics, Applied
WOS IDWOS:000395800200001
PublisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Citation statistics
Cited Times:5[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://libir.pmo.ac.cn/handle/332002/23292
Collection中国科学院紫金山天文台
Corresponding AuthorZhang, Wen
Affiliation1.Chinese Acad Sci, Purple Mt Observ, Nanjing 210008, Jiangsu, Peoples R China
2.Key Lab Radio Astron, Nanjing 210008, Jiangsu, Peoples R China
Recommended Citation
GB/T 7714
Zhang, Wen,Miao, Wei,Wang, Zheng,et al. Characterization of a Free-Standing Membrane Supported Superconducting Ti Transition Edge Sensor[J]. IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY,2017,27(4):6.
APA Zhang, Wen.,Miao, Wei.,Wang, Zheng.,Liu, Dong.,Zhong, Jia-Qiang.,...&Shi, Sheng-Cai.(2017).Characterization of a Free-Standing Membrane Supported Superconducting Ti Transition Edge Sensor.IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY,27(4),6.
MLA Zhang, Wen,et al."Characterization of a Free-Standing Membrane Supported Superconducting Ti Transition Edge Sensor".IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY 27.4(2017):6.
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