PMO OpenIR
Electron-Beam Evaporated Superconducting Titanium Thin Films for Antenna-Coupled Transition Edge Sensors
Wang, Zheng1,2; Zhang, Wen1,2; Miao, Wei1,2; Liu, Dong1,2; Zhong, Jia-Qiang1,2; Shi, Sheng-Cai1,2,3
2018-06-01
Source PublicationIEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY
ISSN1051-8223
Volume28Issue:4Pages:4
Abstract

Superconducting titanium thin films are good candidates for transition edge sensors. In this paper, we deposit titanium thin films on cooled silicon-on-insulator substrates by using electron-beam evaporation. The deposition rate dependence of the film stress, resistivity, and superconducting transition temperature are presented and analyzed. The relationship between film electrical properties and thickness is discussed. For investigating the heating influence on thin Ti films, a depth profile of oxygen diffusion in the films is also analyzed by X-ray photoelectron spectroscopy.

KeywordElectron beams superconducting thin films thin film sensors titanium
DOI10.1109/TASC.2018.2799418
Indexed BySCI
Language英语
WOS Research AreaEngineering ; Physics
WOS SubjectEngineering, Electrical & Electronic ; Physics, Applied
WOS IDWOS:000425741900001
PublisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Citation statistics
Document Type期刊论文
Identifierhttp://libir.pmo.ac.cn/handle/332002/22278
Collection中国科学院紫金山天文台
Corresponding AuthorWang, Zheng
Affiliation1.Chinese Acad Sci, Purple Mt Observ, Nanjing 210008, Jiangsu, Peoples R China
2.Chinese Acad Sci, Key Lab Radio Astron, Nanjing 210008, Jiangsu, Peoples R China
3.Univ Sci & Technol China, Hefei 230026, Anhui, Peoples R China
Recommended Citation
GB/T 7714
Wang, Zheng,Zhang, Wen,Miao, Wei,et al. Electron-Beam Evaporated Superconducting Titanium Thin Films for Antenna-Coupled Transition Edge Sensors[J]. IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY,2018,28(4):4.
APA Wang, Zheng,Zhang, Wen,Miao, Wei,Liu, Dong,Zhong, Jia-Qiang,&Shi, Sheng-Cai.(2018).Electron-Beam Evaporated Superconducting Titanium Thin Films for Antenna-Coupled Transition Edge Sensors.IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY,28(4),4.
MLA Wang, Zheng,et al."Electron-Beam Evaporated Superconducting Titanium Thin Films for Antenna-Coupled Transition Edge Sensors".IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY 28.4(2018):4.
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