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题名: Microwave loss of DC sputtered NbTiN microstrip lines
作者: Shan, Wenlei1; Sekimoto, Yutaro2; Noguchi, Takashi2
刊名: JAPANESE JOURNAL OF APPLIED PHYSICS
出版日期: 2015-09-01
卷号: 54, 期号:9, 页码:90303
学科分类: 天文和天体物理
DOI: 10.7567/JJAP.54.090303
文章类型: Article
英文摘要: Amorphous NbTiN is widely applied in superconducting electronic devices owing to its merits of wide energy gap, high Tc, and mitigated requirement in fabrication. Its highly disordered feature yields considerable kinetic inductance, making it an ideal material for parametric amplification. To build up the correspondence between the fabrication conditions and the desirable electrical performance, we designed, fabricated, and measured NbTiN microstrip resonators at microwave frequencies. The principal result is that the unloaded Q factor of the resonators does not depend on the film normal state resistivity, which largely depends on the sputtering pressure. This result is consistent with the dirty superconductor theories. (C) 2015 The Japan Society of Applied Physics
WOS标题词: Science & Technology ; Physical Sciences
类目[WOS]: Physics, Applied
研究领域[WOS]: Physics
关键词[WOS]: FILMS
收录类别: SCI
所属项目名称: PMO_LIB-IR
语种: 英语
WOS记录号: WOS:000362024900003
Citation statistics:
内容类型: 期刊论文
URI标识: http://libir.pmo.ac.cn/handle/332002/14803
Appears in Collections:毫米波和亚毫米波技术实验室_期刊论文

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作者单位: 1.Chinese Acad Sci, Purple Mt Observ, Nanjing 210008, Jiangsu, Peoples R China
2.Natl Astron Observ Japan, Mitaka, Tokyo 1818588, Japan
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