PMO OpenIR  > 毫米波和亚毫米波技术实验室
Microwave loss of DC sputtered NbTiN microstrip lines
Shan, Wenlei1; Sekimoto, Yutaro2; Noguchi, Takashi2
2015-09-01
Source PublicationJAPANESE JOURNAL OF APPLIED PHYSICS
Volume54Issue:9Pages:90303
AbstractAmorphous NbTiN is widely applied in superconducting electronic devices owing to its merits of wide energy gap, high Tc, and mitigated requirement in fabrication. Its highly disordered feature yields considerable kinetic inductance, making it an ideal material for parametric amplification. To build up the correspondence between the fabrication conditions and the desirable electrical performance, we designed, fabricated, and measured NbTiN microstrip resonators at microwave frequencies. The principal result is that the unloaded Q factor of the resonators does not depend on the film normal state resistivity, which largely depends on the sputtering pressure. This result is consistent with the dirty superconductor theories. (C) 2015 The Japan Society of Applied Physics
Subject Area天文和天体物理
WOS HeadingsScience & Technology ; Physical Sciences
DOI10.7567/JJAP.54.090303
WOS KeywordFILMS
Indexed BySCI
Language英语
WOS Research AreaPhysics
WOS SubjectPhysics, Applied
WOS IDWOS:000362024900003
Citation statistics
Cited Times:1[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://libir.pmo.ac.cn/handle/332002/14803
Collection毫米波和亚毫米波技术实验室
Affiliation1.Chinese Acad Sci, Purple Mt Observ, Nanjing 210008, Jiangsu, Peoples R China
2.Natl Astron Observ Japan, Mitaka, Tokyo 1818588, Japan
Recommended Citation
GB/T 7714
Shan, Wenlei,Sekimoto, Yutaro,Noguchi, Takashi. Microwave loss of DC sputtered NbTiN microstrip lines[J]. JAPANESE JOURNAL OF APPLIED PHYSICS,2015,54(9):90303.
APA Shan, Wenlei,Sekimoto, Yutaro,&Noguchi, Takashi.(2015).Microwave loss of DC sputtered NbTiN microstrip lines.JAPANESE JOURNAL OF APPLIED PHYSICS,54(9),90303.
MLA Shan, Wenlei,et al."Microwave loss of DC sputtered NbTiN microstrip lines".JAPANESE JOURNAL OF APPLIED PHYSICS 54.9(2015):90303.
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