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Extraction of material parameters of a bi-layer structure using Terahertz time-domain spectroscopy
Jin BiaoBing1; Zhang CaiHong1; Shen XiaoFang2,3; Ma JinLong1; Chen Jian1; Shi ShengCai2; Wu PeiHeng1
2014-08-01
Source PublicationSCIENCE CHINA-INFORMATION SCIENCES
ISSN1674-733X
Volume57Issue:8Pages:0
AbstractFor a bi-layer structure consisting of a film deposited on a substrate, a new extraction method is proposed using which we can extract both the material parameters of the film and the thickness of the substrate from the measured Terahertz transmission through it, so long as the complex refractive index of the substrate is known beforehand. This method is applicable to a range of refractive indices of the film less than the refractive index of the substrate and a very wide range of layer thicknesses from 20 mu m to at least 200 mu m. It is very useful in some cases where the thickness of the substrate cannot be determined using conventional methods such as a Vernier caliper or micrometer screw.
KeywordMaterial Parameter Terahertz Spectrum Extraction Method Anti-reflection Coating Layer Thz-time-domain Spectroscopy
WOS HeadingsScience & Technology ; Technology
DOI10.1007/s11432-014-5136-2
WOS KeywordSUPERCONDUCTING THIN-FILMS ; SILICON ; CONDUCTIVITY ; TECHNOLOGY ; THICKNESS ; LAYERS
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Indexed BySCI
Language英语
WOS Research AreaComputer Science
WOS SubjectComputer Science, Information Systems
WOS IDWOS:000339365500022
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Document Type期刊论文
Identifierhttp://libir.pmo.ac.cn/handle/332002/10578
Collection毫米波和亚毫米波技术实验室
Affiliation1.Nanjing Univ, RISE, Sch Elect Sci & Engn, Nanjing 210093, Jiangsu, Peoples R China
2.Chinese Acad Sci, Purple Mt Observ, Nanjing 210008, Peoples R China
3.Chinese Acad Sci, Grad Sch, Beijing 100086, Peoples R China
Recommended Citation
GB/T 7714
Jin BiaoBing,Zhang CaiHong,Shen XiaoFang,et al. Extraction of material parameters of a bi-layer structure using Terahertz time-domain spectroscopy[J]. SCIENCE CHINA-INFORMATION SCIENCES,2014,57(8):0.
APA Jin BiaoBing.,Zhang CaiHong.,Shen XiaoFang.,Ma JinLong.,Chen Jian.,...&Wu PeiHeng.(2014).Extraction of material parameters of a bi-layer structure using Terahertz time-domain spectroscopy.SCIENCE CHINA-INFORMATION SCIENCES,57(8),0.
MLA Jin BiaoBing,et al."Extraction of material parameters of a bi-layer structure using Terahertz time-domain spectroscopy".SCIENCE CHINA-INFORMATION SCIENCES 57.8(2014):0.
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